Alignment Stage
Alignment Stage
Price range: ¥1.00 through ¥20.00
The CY Series alignment stages deliver ±1μm to ±5μm repeat positioning accuracy, supporting multi-axis fine adjustment and angular tilt within ±6°, specifically designed for optical alignment, wafer positioning, and precision assembly applications.
| Delivery Time | 7day |
|---|---|
| Dimensions(mm） | Depending on model |
Product Features
- Repeat positioning accuracy: ±1μm to ±5μm, depending on the configuration.
- Adjustment: Multi-axis fine adjustment and angular tilt within ±6°, depending on the model.
- Applications: Optical alignment, wafer positioning, and precision assembly.
Technical Specifications
CY00-160LC
| Parameter | Specification |
|---|---|
| Table Size (mm) | 160 × 160 |
| Base Dimensions (mm) | 170 × 170 |
| Height (mm) | 50 |
| Travel Range (mm) | ±3 × ±3 |
| Angle (θ) | ±2° |
| Table Material / Surface Treatment | UP: Carbon Steel / Black Surface Treatment P: Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø6-P2 |
| Horizontal Load Capacity (kgf) | 30 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 30 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 28 Keyway Output Shaft / PKP523N12B P: 28 Keyway Output Shaft / 2MS-N28D32A |
| Driver Brand / Model | UP: Oriental / CVD512-K P: Consult Sales |
CY01-200RS
| Parameter | Specification |
|---|---|
| Table Size (mm) | 200 × 200 |
| Base Dimensions (mm) | 230 × 230 |
| Height (mm) | 92 |
| Travel Range (mm) | ±10 × ±10 |
| Angle (θ) | ±6° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø12-P4 |
| Horizontal Load Capacity (kgf) | 65 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 30 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 42 Keyway Output Shaft / PKP544N18B P: 42 Keyway Output Shaft / 2MS-N42D47A |
| Driver Brand / Model | UP: Oriental / CVD518-K P: Consult Sales |
CY01-250RS
| Parameter | Specification |
|---|---|
| Table Size (mm) | 250 × 250 |
| Base Dimensions (mm) | 350 × 350 |
| Height (mm) | 90 |
| Travel Range (mm) | ±5 × ±5 |
| Angle (θ) | ±3° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø10-P2 |
| Horizontal Load Capacity (kgf) | 100 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 30 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 42 Keyway Output Shaft / PKP544N18B P: 42 Keyway Output Shaft / 2MS-N42D47A |
| Driver Brand / Model | UP: Oriental / CVD518-K P: Consult Sales |
CY01-350RS
| Parameter | Specification |
|---|---|
| Table Size (mm) | 350 × 350 |
| Base Dimensions (mm) | 450 × 450 |
| Height (mm) | 90 |
| Travel Range (mm) | ±5 × ±5 |
| Angle (θ) | ±2° |
| Table Material / Surface Treatment | UP: Duralumin / Black Anodized P: Carbon Steel / Black Surface Treatment |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø10-P2 |
| Horizontal Load Capacity (kgf) | 100 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 40 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 42 Keyway Output Shaft / PKP544N18B P: 42 Keyway Output Shaft / 2MS-N42D47A |
| Driver Brand / Model | UP: Oriental / CVD518-K P: Consult Sales |
CY02-400RS
| Parameter | Specification |
|---|---|
| Table Size (mm) | 400 × 400 |
| Base Dimensions (mm) | 500 × 500 |
| Height (mm) | 110 |
| Travel Range (mm) | ±10 × ±10 |
| Angle (θ) | ±3.5° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø16-P2 |
| Horizontal Load Capacity (kgf) | 130 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 40 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 42 Keyway Output Shaft / PKP544N18B P: 42 Keyway Output Shaft / 2MS-N42D47A |
| Driver Brand / Model | UP: Oriental / CVD518-K P: Consult Sales |
CY02-500CC
| Parameter | Specification |
|---|---|
| Table Size (mm) | 500 × 500 |
| Base Dimensions (mm) | 600 × 600 |
| Height (mm) | 110 |
| Travel Range (mm) | ±10 × ±10 |
| Angle (θ) | ±2.5° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø8-P2 |
| Horizontal Load Capacity (kgf) | 105 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 60 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 42 Keyway Output Shaft / PKP544N18B P: 42 Keyway Output Shaft / 2MS-N42D47A |
| Driver Brand / Model | UP: Oriental / CVD518-K P: Consult Sales |
CY02-500RS
| Parameter | Specification |
|---|---|
| Table Size (mm) | 500 × 500 |
| Base Dimensions (mm) | 600 × 600 |
| Height (mm) | 110 |
| Travel Range (mm) | ±10 × ±10 |
| Angle (θ) | ±2.5° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø16-P2 |
| Horizontal Load Capacity (kgf) | 130 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 60 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 42 Keyway Output Shaft / PKP544N18B P: 42 Keyway Output Shaft / 2MS-N42D47A |
| Driver Brand / Model | UP: Oriental / CVD518-K P: Consult Sales |
CY02-750CC
| Parameter | Specification |
|---|---|
| Table Size (mm) | 750 × 750 |
| Base Dimensions (mm) | 850 × 850 |
| Height (mm) | 110 |
| Travel Range (mm) | ±10 × ±10 |
| Angle (θ) | ±1.5° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø8-P2 |
| Horizontal Load Capacity (kgf) | 105 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 80 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 42 Keyway Output Shaft / PKP544N18B P: 42 Keyway Output Shaft / 2MS-N42D47A |
| Driver Brand / Model | UP: Oriental / CVD518-K P: Consult Sales |
CY02-750RS
| Parameter | Specification |
|---|---|
| Table Size (mm) | 750 × 750 |
| Base Dimensions (mm) | 850 × 850 |
| Height (mm) | 110 |
| Travel Range (mm) | ±10 × ±10 |
| Angle (θ) | ±1.5° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø16-P2 |
| Horizontal Load Capacity (kgf) | 130 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 80 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 42 Keyway Output Shaft / PKP544N18B P: 42 Keyway Output Shaft / 2MS-N42D47A |
| Driver Brand / Model | UP: Oriental / CVD518-K P: Consult Sales |
CY03-1000CC
| Parameter | Specification |
|---|---|
| Table Size (mm) | 1000 × 1000 |
| Base Dimensions (mm) | 1200 × 1200 |
| Height (mm) | 160 |
| Travel Range (mm) | ±15 × ±15 |
| Angle (θ) | ±2° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø10-P4 |
| Horizontal Load Capacity (kgf) | 160 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 150 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 60 Keyway Output Shaft / PKP564N18B P: 57 Keyway Output Shaft / 2MS-N57D41A |
| Driver Brand / Model | UP: Oriental / CVD524-K P: Consult Sales |
CY03-1000RS
| Parameter | Specification |
|---|---|
| Table Size (mm) | 1000 × 1000 |
| Base Dimensions (mm) | 1200 × 1200 |
| Height (mm) | 160 |
| Travel Range (mm) | ±15 × ±15 |
| Angle (θ) | ±2° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø20-P2 |
| Horizontal Load Capacity (kgf) | 105 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 150 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 60 Keyway Output Shaft / PKP564N18B P: 57 Keyway Output Shaft / 2MS-N57D41A |
| Driver Brand / Model | UP: Oriental / CVD524-K P: Consult Sales |
CY03-1500CC
| Parameter | Specification |
|---|---|
| Table Size (mm) | 1500 × 500 |
| Base Dimensions (mm) | 600 × 600 |
| Height (mm) | 160 |
| Travel Range (mm) | ±15 × ±15 |
| Angle (θ) | ±1° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø10-P4 |
| Horizontal Load Capacity (kgf) | 160 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 200 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 60 Keyway Output Shaft / PKP564N18B P: 57 Keyway Output Shaft / 2MS-N57D41A |
| Driver Brand / Model | UP: Oriental / CVD524-K P: Consult Sales |
CY03-1500RC
| Parameter | Specification |
|---|---|
| Table Size (mm) | 1500 × 500 |
| Base Dimensions (mm) | 1700 × 1700 |
| Height (mm) | 160 |
| Travel Range (mm) | ±15 × ±15 |
| Angle (θ) | ±1° |
| Table Material / Surface Treatment | Duralumin / Black Anodized |
| Base Material / Surface Treatment | Duralumin / Black Anodized |
| Lead Screw Specification | Ø10-P4 |
| Horizontal Load Capacity (kgf) | 200 |
| Repeatability (μm) | UP: ±1 P: ±5 |
| Parallelism (μm) | 200 |
| Motor Brand / Type | UP: Oriental / 5-Phase Stepper P: 2-Phase Stepper |
| Motor Shaft / Model | UP: 60 Keyway Output Shaft / PKP564N18B P: 57 Keyway Output Shaft / 2MS-N57D41A |
| Driver Brand / Model | UP: Oriental / CVD524-K P: Consult Sales |
